American Vacuum Society; American Institute of Physics.
NLM Title Abbreviation: J Vac Sci Technol B Nanotechnol Microelectron
ISSN:2166-2746 (Print) ; 2166-2754 (Electronic) ; 2166-2746 (Linking)
New York, NY : AVS through the American Institute of Physics, c2010-
Not currently indexed for MEDLINE