Result Filters
The Journal of vacuum science and technology.
- Author(s):
- American Institute of Physics
- American Vacuum Society
- Title(s):
- The Journal of vacuum science and technology.
- Split Into:
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films ISSN 0734-2101
Journal of vacuum science & technology. B, Microelectronics processing and phenomena ISSN 0734-211X
- Publication Start Year:
- 1964
- Publication End Year:
- 1982
- Frequency:
- 8 no. a year, Jan. 1982-Nov./Dec. 1982
- Country of Publication:
- United States
- Publisher:
- [New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, [1964-1982]
- Description:
- 21 v. : ill. ; 28 cm.
-
Language:
- English
- ISSN:
- 0022-5355 (Print)
0022-5355 (Linking)
- Coden:
- JVSTAL
- LCCN:
- 68053979
sn 83011019
- Notes:
- Title varies slightly.
Title from cover.
Also available on microfilm.
Official publication of the American Vacuum Society.
Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena.
- Other ID:
- (OCoLC)01754855
(DNLM)SR0088358(s)
- NLM ID:
- 9890565 [Serial]