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Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.
- Author(s):
- American Vacuum Society
- American Institute of Physics
- NLM Title Abbreviation:
- J Vac Sci Technol B Microelectron Process Phenom
- Title(s):
- Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.
- Other Title(s):
- Journal of vacuum science and technology. B, Microelectronics processing and phenomena
Microelectronics processing and phenomena - Continues In Part:
- Journal of vacuum science and technology ISSN 0022-5355
- Continued By:
- Journal of vacuum science & technology. B, Microelectronics and nanometer structures ISSN 1071-1023
- Related Title:
- Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams
Proceedings of the ... Molecular Beam Epitaxy Workshop
- Publication Start Year:
- 1983
- Publication End Year:
- 1990
- Frequency:
- Bimonthly, <Jan./Feb. 1985->
- Country of Publication:
- United States
- Publisher:
- New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-c1990.
- Description:
- 8 v. : ill. ; 29 cm.
-
Language:
- English
- ISSN:
- 0734-211X (Print)
0734-211X (Linking)
- Coden:
- JVTBD9
- LCCN:
- 83642371
sn 82003446
- In:
- PubMed: Selected citations only
- Notes:
- Title from cover.
Issued also on microfilm.
Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.
- Other ID:
- (OCoLC)08697479
(DNLM)SR0088360(s)
- NLM ID:
- 9890567 [Serial]