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Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.

Author(s):
American Vacuum Society
American Institute of Physics
NLM Title Abbreviation:
J Vac Sci Technol B Microelectron Process Phenom
Title(s):
Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.
Other Title(s):
Journal of vacuum science and technology. B, Microelectronics processing and phenomena
Microelectronics processing and phenomena
Continues In Part:
Journal of vacuum science and technology ISSN 0022-5355
Continued By:
Journal of vacuum science & technology. B, Microelectronics and nanometer structures ISSN 1071-1023
Related Title:
Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams
Proceedings of the ... Molecular Beam Epitaxy Workshop
Publication Start Year:
1983
Publication End Year:
1990
Frequency:
Bimonthly, <Jan./Feb. 1985->
Country of Publication:
United States
Publisher:
New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-c1990.
Description:
8 v. : ill. ; 29 cm.
Language:
English
ISSN:
0734-211X (Print)
0734-211X (Linking)
Coden:
JVTBD9
LCCN:
83642371
sn 82003446
In:
PubMed: Selected citations only
Notes:
Title from cover.
Issued also on microfilm.
Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.
Other ID:
(OCoLC)08697479
(DNLM)SR0088360(s)
NLM ID:
9890567 [Serial]

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