Development of high-order harmonic focusing system based on ellipsoidal mirror

H Motoyama; T Sato; A Iwasaki; Y Takei; T Kume; S Egawa; K Hiraguri; H Hashizume; K Yamanouchi; H Mimura

doi:10.1063/1.4950735

Development of high-order harmonic focusing system based on ellipsoidal mirror

Rev Sci Instrum. 2016 May;87(5):051803. doi: 10.1063/1.4950735.

Authors

H Motoyama¹, T Sato², A Iwasaki², Y Takei¹, T Kume¹, S Egawa¹, K Hiraguri³, H Hashizume³, K Yamanouchi², H Mimura¹

Affiliations

¹ Department of Precision Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkuyo-ku, Tokyo 113-8656, Japan.
² Department of Chemistry, School of Science, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan.
³ Natsume Optical Corp., 3461 Kamichaya, Kanae, Iida, Nagano 395-0808, Japan.

PMID: 27250370
DOI: 10.1063/1.4950735

Abstract

We have developed a focusing system for extreme ultraviolet light produced by high-order harmonic generation. An ellipsoidal mirror with a precise surface shape was fabricated and installed into the focusing system. A rigid mirror manipulator and a beam profiler were employed to perform precise and stable mirror alignment. As a demonstration of the focusing performance, high-order harmonics in the wavelength range of 13.5-19.5 nm were successfully focused into a 2.4 × 2.3 μm(2) spot.

Publication types

Research Support, Non-U.S. Gov't