High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array

Opt Express. 2010 Nov 8;18(23):23900-5. doi: 10.1364/OE.18.023900.

Abstract

High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1 W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6° at a current of 4 A. These properties between microlens-integrated and conventional device at different operating current are demonstrated.

Publication types

  • Research Support, Non-U.S. Gov't