Regularized multiframe phase-shifting algorithm for three-dimensional profilometry

Fuqin Deng; Wui Fung Sze; Jiangwen Deng; Kenneth S M Fung; W H Leung; Edmund Y Lam

doi:10.1364/AO.51.000033

Regularized multiframe phase-shifting algorithm for three-dimensional profilometry

Appl Opt. 2012 Jan 1;51(1):33-42. doi: 10.1364/AO.51.000033.

Authors

Fuqin Deng¹, Wui Fung Sze, Jiangwen Deng, Kenneth S M Fung, W H Leung, Edmund Y Lam

Affiliation

¹ Imaging Systems Laboratory, Department of Electrical and Electronic Engineering, University of Hong Kong, Pokfulam Road, Hong Kong 999077, China.

PMID: 22270411
DOI: 10.1364/AO.51.000033

Abstract

In many industrial inspection systems, it is required to have a high-precision three-dimensional measurement of an object under test. A popular technique is phase-measuring profilometry. In this paper, we develop some phase-shifting algorithms (PSAs). We propose a novel smoothness constraint in a regularization framework; we call this the R-PSA method and show how to obtain the desired phase measure with an iterative procedure. Both the simulation and experimental results verify the efficacy of our algorithm compared with current multiframe PSAs for interferometric measurements.