Computation lithography: virtual reality and virtual virtuality

Edmund Y Lam; Alfred K Wong

doi:10.1364/oe.17.012259

Computation lithography: virtual reality and virtual virtuality

Opt Express. 2009 Jul 20;17(15):12259-68. doi: 10.1364/oe.17.012259.

Authors

Edmund Y Lam¹, Alfred K Wong

Affiliation

¹ Imaging Systems Laboratory, Department of Electrical and Electronic Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong. elam@eee.hku.hk

PMID: 19654627
DOI: 10.1364/oe.17.012259

Abstract

Computation lithography is enabled by a combination of physical understanding, mathematical abstraction, and implementation simplification. An application in the virtual world of computation lithography can be a virtual reality or a virtual virtuality depending on its engineering sensibleness and technical feasibility. Examples under consideration include design-for-manufacturability and inverse lithography.

Publication types

Research Support, Non-U.S. Gov't

MeSH terms

Algorithms
Computer Simulation
Equipment Design
Models, Statistical
Models, Theoretical
Optics and Photonics*
Physics / methods